Technologiceskij kontrol' razmerov v mikroelektronnom proizvodstve / (Rekord nr 4618)
| 000 -LEADER | |
|---|---|
| fixed length control field | 00470 a2200133 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 5256000063 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Bystrov, Ju.A.. |
| Relator term | Autor |
| 245 0# - TITLE STATEMENT | |
| Title | Technologiceskij kontrol' razmerov v mikroelektronnom proizvodstve / |
| Statement of responsibility, etc | Bystrov Ju.A., Kolgin E.A., Kotlecov B.N.. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Moskva : |
| Name of publisher, distributor, etc | Radio i Svjaz', |
| Date of publication, distribution, etc | 1988. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 168 s.: |
| Other physical details | il.; |
| Dimensions | 22 cm. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kolgin, E.A.. |
| Relator term | Autor |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kotlecov, B.N.. |
| Relator term | Autor |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Radio i Svjaz'. |
| Relator term | Wydawca |
| Relator code | pbl |
| 920 ## - | |
| -- | 5-256-00006-3 |
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