| 000 | 00389 a2200121 4500 | ||
|---|---|---|---|
| 020 | _a503001716X | ||
| 920 | _a5-03-001716-X | ||
| 100 | 1 |
_aMoreau, Wayne M.. _eAutor |
|
| 700 | 1 |
_aTimerov, R.Ch.. _eRedaktor |
|
| 245 | 0 |
_aMikrolitografija : _bprincipy,metody,materialy / _cMoreau Wayne M., Timerov R.Ch.. _nc.1 |
|
| 710 | 2 |
_aMir. _eWydawca _4pbl |
|
| 260 |
_aMoskva : _bMir, _c1990. |
||
| 300 |
_a606 s.: _bil.; _c22 cm. |
||
| 999 |
_c8396 _d8396 |
||