| 000 | 00323 a2200073 4500 | ||
|---|---|---|---|
| 245 | 0 |
_aFundamentals of Silicon Integrated Device Technology : _bOxidation, diffusion and epitaxy / _cBurger R. M., Donovan R. P.. _nvol. 1 |
|
| 710 | 2 |
_aPrentice-Hall. _eWydawca _4pbl |
|
| 260 |
_aEnglewood Cliffs, N.J. : _bPrentice-Hall, _c1967. |
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| 300 |
_aXIV,495 s.; _c25 cm. |
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| 999 |
_c5510 _d5510 |
||