| 000 | 00470 a2200133 4500 | ||
|---|---|---|---|
| 020 | _a5256000063 | ||
| 920 | _a5-256-00006-3 | ||
| 100 | 1 |
_aBystrov, Ju.A.. _eAutor |
|
| 700 | 1 |
_aKolgin, E.A.. _eAutor |
|
| 700 | 1 |
_aKotlecov, B.N.. _eAutor |
|
| 245 | 0 |
_aTechnologiceskij kontrol' razmerov v mikroelektronnom proizvodstve / _cBystrov Ju.A., Kolgin E.A., Kotlecov B.N.. |
|
| 710 | 2 |
_aRadio i Svjaz'. _eWydawca _4pbl |
|
| 260 |
_aMoskva : _bRadio i Svjaz', _c1988. |
||
| 300 |
_a168 s.: _bil.; _c22 cm. |
||
| 999 |
_c4618 _d4618 |
||