000 00363 a2200097 4500
020 _a0819409626
920 _a0-8194-0962-6
245 0 _aInternational Conference of Microelectronics :
_bMicroelectronics'92 /
_cSowiƄski Andrzej.
710 2 _aSPIE Optical Engineering Press.
_eWydawca
_4pbl
260 _aBellingham, Washington :
_bSPIE Press,
_c1992.
300 _aXII, 652 s.:
_bil.;
_c28 cm.
999 _c2061
_d2061