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008 020716s2001 xxka | |00| ||eng|c
020 _a047186109X
035 _azz2002930163
039 9 _a201606081327
_bkopilwa
_c201512302152
_dmaciej
_c201305310110
_dVLOAD
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_dVLOAD
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040 _aLUBL 64/MK
_cLUBL 64/MK
_dLUBL 64/WSs
100 1 _aGardner, Julian W.
_d(1958- ).
245 1 0 _aMicrosensors, MEMS, and smart devices /
_cJulian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim.
260 _aChichester :
_bJohn Wiley & Sons, LTD,
_c2001.
300 _aXVI, 503 s. :
_bil. ;
_c25 cm.
504 _aBibliogr. przy rozdz.
650 _aMikroczujniki.
650 _aMikroobróbka.
650 _aMikroelektronika
_xmateriały.
700 1 _aVaradan, Vijay Krishna
_d(1943- ).
700 1 _aAwadelkarim, Osama O.
920 _a0-471-86109-X
953 _aKR_93
959 _aLUBL_64
961 _aWA_310
999 _aVIRTUA40 m
_c17527
_d17527
999 _aVTLSSORT0080*0200*0350*0400*0410*1000*2450*2600*3000*5040*6500*6501*6502*7000*7001*9200*9590*9992